newsroom 3/28 '20 posted
• Samsung Electronics will mass-produce next-generation 10-nano-class (1a) DRAM (DDR5, LPDDR5), which will have higher performance and capacity next year, and advance development of 5th and 6th generation DRAMs to further strengthen technological leadership in the premium memory market. 
• The 4th generation 10nm class (1a) DRAM made using EUV has doubled the productivity per 12 inch wafer compared to the 1st generation 10nm class (1x) DRAM to further strengthen business competitiveness.
• Samsung Electronics explained, "Applying the extreme ultraviolet exposure technology reduces the multi-patterning process and increases accuracy, thereby improving performance and yield and shortening the product development period."